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Scraping of the build-up substrate

Processing Details

  • Scraping

Fine surface processing by wet blasting

Physical processing, which allows the filler-containing resin layer on the build-up substrate surface to be processed uniformly at high speed.

Process Objective

    •  Surface is exposed by removing a very thin layer of the surface of the substrate on which electric parts are embedded.
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    • Grinding of the resin on the surface of the substrate and only the circuits are left on it.
2.基板上の樹脂表面を、回路部分のみを残し削りこむ

Problems with conventional processing methods

Dry Etching (Plasma)
  • Etching of the filler-contained resin is difficult.
  • It takes longer time to process over ten microns.
Laser
  • It takes a longer time to process patterning over a large area.
  • Desmear is required.
Machining
  • Knife is immdediately damaged due to the filler.
  • It even over-processes necessary parts and conductors.

Processing Image

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The Copper Wiring's Exposure According to Wet Blasting

Features

    • Half-etching of the entire surface for the filler-contained resin.
    • Process selection of the resin to reduce Copper etching.
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Processing of undercoat materials

  • Patterning using copper as a mask.
  • High accuracy by anisotropic processing.
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  • Possible to alleviate (reduce) damage to conductors by processing with resin abrasives or super fine aluminum oxide abrasives.

Processing Condition

Abrasive Used Alumina A#2000
Air Pressure 0.25 MPa
Processing Speed 20 mm/sec
Projection (Spray) Angle 90°
Number of Passes for Processing 4-10 passes

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Example of the formation of an embedded capacitor

  • Patterning using copper as a mask.
  • High accuracy by anisotropic processing.
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